YASKAWA to Launch “SEMISTAR-GEKKO MD124D”, a High-Precision & Low-Vibration Clean Robot for Transferring Semiconductor Wafers that Adopts a Direct Drive System, and “SR200”, a Standard Controller for Clean Robots

Contributing to the improvement of semiconductor wafer productivity and low-damage transport.

Yaskawa Electric Corporation (Head Office: Kitakyushu City, Fukuoka Prefecture; Representative Director and President: Hiroshi Ogasawara) announced the launch of a new clean robots for semiconductor wafer transfer, the “SEMISTAR-GEKKO MD124D” which equipped the direct drive motor (DD motor) of Yaskawa’s AC servo motor “Σ-7 series”.

The robot enables semiconductor wafer transfer with higher precision (positioning accuracy twice as high) and lower vibration (1/6) than the conventional model. Collectively, we developed the SR200, a standard controller for clean robots that is not only smaller and lighter, but the improved drive capability and expandability. SR200 is applied to all Yaskawa’s clean robots to maximize their performance.

1. Purpose of Launch
In recent years, the technical advancement such as the improved smartphone performance, the demanded and sophisticated data centers by Internet of Things (IoT) trend, and the faster and larger data connection with 5G are remarkable, and the major components to support these technologies are semiconductors. Innovations in semiconductor technology have been made possible by nanometer level miniaturization and multilayer technology in semiconductor manufacturing processes, and there has been a need for clean robots for wafer transfer to contribute to these evolutions.

For example, there were requests to transport wafers to specified positions with high precision, to safely transport the same number of slices without placing stress on the wafers, and to transport wafers to narrow pitches to accommodate a large number of wafers. In response to these customer requests, we have developed a new clean robot with higher precision and lower vibration.

2. Key Features
Compared to the conventional product “SEMISTAR-MR124”, the installation of robots as well as a layout of the transfer function are completely compatible while maintaining the shape of a manipulator, the absolute position accuracy (0.05 mm *¹) and the repeatability position accuracy (±0.025 mm *¹) are twice as high, and the hand vibration (0.25G *¹ 1G=9.8 m/s2) during transfer is also greatly reduced. To achieve these performances, the robot arm is driven by a direct drive motor from Yaskawa’s AC servo motor “Σ-7 series”, which does not require a gear reducer.

The “SR200” a standard controller for clean robots also equips Yaskawa’s machine controller (MP), and while its volume and mass are 42% and 35% lower than those of conventional models, it has scalability to comply with major standards such as SEMI.

In addition to improving the product specifications, we are also offering the better quality of after-sales services. For example, we adopted the battery-less design from the robot and removed the step of battery replacement. Moreover, we can make it easier for customers to obtain necessary information, which can lead to process analysis and improved productivity. By reviewing the parts procured for both the robot and the controller, the products are made with sustainability in mind, such as continuing production.

*1: An example of the result by Yaskawa measurement condition

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